Symposium FC
Research Advances on Micro/Nano Systems and their Applications

Leandro LORENZELLI, Fondazione Bruno Kessler, Italy
Farrokh AYAZI, Georgia Tech, USA
Juergen BRUGGER, EPFL, Switzerland
Alberto CORIGLIANO, Politecnico di Milano, Italy
Chang Beom EOM, University of Wisconsin, USA
Elvira FORTUNATO, New University of Lisbon, Portugal
Hiroshi FUNAKUBO, Tokyo Institute of Technology, Japan
Christofer HIEROLD, ETH Zurich, Switzerland
Andrew HOLMES, Imperial College London, UK
James C.M. HWANG, Lehigh University, USA
Bernhard JAKOBY, Johannes Kepler University Linz, Austria
Sang-Gook KIM, MIT, USA
Chengkuo LEE, National University of Singapore, Singapore
Wen Jung LI, Chinese University of Hong Kong, Hong Kong
Liwei LIN, University of California, Berkeley, USA
Marc J. MADOU, University of California, Irvine, USA
Sabina MERLO, University of Pavia, Italy
Yves-Alain PETER, Ecole Polytechnique Montréal, Canada
Jose-Luis SANCHEZ-ROJAS, University of Castilla La Mancha, Spain
Pietro SICILIANO, IMM - CNR, Italy
Osamu TABATA, Kyoto University, Japan
Haixia ZHANG, Peking University, China
Advances in the research of innovative materials, sensors, and actuators constitute the building blocks for identifying new approaches for the integration of machine intelligence into Micro & Nano Systems. Moreover, technologies for the fabrication of devices and systems at micro- and nano-scales continue to advance and diversify due to the rising opportunities offered by the miniaturisation, functional integration and performance enhancement.
Both these fast technology developments will contribute to the growth in many areas of the research and will have an impact in: medical devices (e.g. Organ on a chip, Smart Patches, Implantable devices), Environmental monitoring, Internet of Things, automotive (e.g. smart cars), space (e.g. MEMS for microsatellites) and telecommunications (e.g. RFMEMS) and other important areas addressing societal challenges.
In order to satisfy all these expectations, the integration of heterogeneous micro-nano-technologies with new active, responsive, and nano-engineered materials, such as piezoelectrics, nanowires, graphene, bioactive and biodegradable ceramics and polymers, plays an important role. Novel advances in this sector of the research require delves into the state of the art of microsystems and in their applications.
The objective of the Symposium is twofold: a) to share the progress in the field and b) to identify the technological orientation and future challenges offered by the connection between innovative materials and micro/nanotechnologies. The involvement of representatives of key research disciplines will offer a podium to enable community building and networking, the sharing of progress in both technology and application development, and the identification of common interests.
Subject matter include but is not limited to: 

-Advanced materials for sensors and actuators
-Nanoscale and quantum effects
-Innovative devices and sensing principles
-Design, simulation and theoretical concepts
-Technologies for MicroNanoBioSystems (MNBS)
-System Integration and Electronics for smart sensors
-Novel lithographic and nanotechnology approaches
-Testing and reliability issues at micro/nano scales
-Innovative applications
Session Topics

FC-1 Physical MEMS/NEMS

FC-2 Chemical micro/nano-sensors and systems


FC-4 Smart micro-nano system and components integration

FC-5 Radio frequency MEMS

FC-6 Energy harvesting and power supply MEMS

FC-7 Micro(nano)fluidics and Lab on Chip


FC-9 Flexible sensors technology


Cimtec 2020

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